ニオブ酸リチウム基板を用いた表面弾性波応用マイクロ流体システム

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	16
Journal	Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
Publication status	Published - 2007 Apr 1

Cite this

@article{f1c8437cd29c49f0acab6c566992f182,

title = "ニオブ酸リチウム基板を用いた表面弾性波応用マイクロ流体システム",

author = "Sumito Nagasawa",

year = "2007",

month = apr,

day = "1",

language = "English",

pages = "16",

journal = "Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)",

}