| Original language | English |
|---|---|
| Pages (from-to) | 17 |
| Journal | Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007) |
| Publication status | Published - 2007 Apr 1 |
微小領域温度計測用非接触型SThMプローブ
Research output: Contribution to journal › Article › peer-review