Original language | English |
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Pages (from-to) | 5 |
Journal | Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007), |
Publication status | Published - 2007 Apr 1 |
自己クローニングフォトニック結晶を利用したMEMS動的光学デバイス
Research output: Contribution to journal › Article › peer-review