西川 宏之

研究成果

年別の研究成果 1989 1994 1995 1996 1997 2007 2009 2010 2011 2012 2022

• 139 Article
• 17 Conference contribution
• 9 Conference article
• 8 Paper
• 1 その他
  • 1 Review article

年別の研究成果

年別の研究成果

検索結果

• 2022

  Utilizing a photosensitive dry film resist in proton beam writing

  Seki, H., Kawamura, K., Hayashi, H., Ishii, Y., Puttaraksa, N. & Nishikawa, H., 2022 6月, In: Japanese Journal of Applied Physics. 61, SD, SD1006.

  研究成果: Article › 査読

  • Proton beams 100%
  • proton beams 62%
  • Protons 29%
  • protons 16%
  • Irradiation 12%
• 2021

  Dielectrophoretic devices fabricated by proton beam writing for concentration, assembly, and detection of nanoparticles

  Nishikawa, H., Kimura, T., Kawashima, R., Yamamoto, K., Uchida, S. & Ishii, Y., 2021, In: IEEJ Transactions on Fundamentals and Materials. 141, 10, p. 574-578 5 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Electrophoresis 80%
  • Nanoparticles 60%
  • Polymers 33%
  • Silver nanoparticles 22%
• 2019

  Assembling gold nanoparticles by dielectrophoresis with pit arrays on PMMA fabricated by proton beam writing

  Shibuya, T., Uchida, S., Ishii, Y. & Nishikawa, H., 2019 10月 1, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 456, p. 60-63 4 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Gold nanoparticles 97%
  • Electrophoresis 80%
  • assembling 70%
  • proton beams 62%
  4 被引用数 (Scopus)

• Electronic circuit formation on flexible polymer surface processed by 1 MV accelerated hydrogen molecular ions

  Hayashi, H., Furukawa, W. & Nishikawa, H., 2019 11月 15, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 459, p. 76-80 5 p.

  研究成果: Article › 査読

  • hydrogen ions 100%
  • molecular ions 97%
  • Ions 81%
  • Hydrogen 70%
  • Polymers 64%

• Refractive index change and thermo-optic effect in polydimethylsiloxane nanocomposites with oxide nanoparticles induced by proton beam writing

  Kaneko, Y., Hayashi, H., Ishii, Y., Kada, W. & Nishikawa, H., 2019 11月 15, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 459, p. 94-97 4 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Refractive index 80%
  • Polydimethylsiloxane 77%
  • Nanocomposites 66%
  • Optics 63%
  5 被引用数 (Scopus)
• 2017

  Evaluation of the induced modification of a TiO₂/polydimethylsiloxane composite by proton beam

  Kaneko, Y., Hayashi, H. & Nishikawa, H., 2017, In: IEEJ Transactions on Fundamentals and Materials. 137, 11, p. 652-653 2 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Polydimethylsiloxane 77%
  • Refractive index 40%
  • Composite materials 35%
  • TiO2 nanoparticles 29%

• Fabrication of BIT thick films patterned by proton beam writing

  Yamaguchi, M., Watanabe, K., Nishikawa, H. & Masuda, Y., 2017 7月 1, In: Journal of the Korean Physical Society. 71, 2, p. 88-91 4 p.

  研究成果: Article › 査読

  • titanates 100%
  • proton beams 87%
  • bismuth 84%
  • thick films 81%
  • fabrication 52%
  1 被引用数 (Scopus)

• Micro-structuring of epoxy resists containing nanoparticles by proton beam writing

  Sano, R., Hayakawa, S., Hayashi, H., Ishii, Y. & Nishikawa, H., 2017 8月 1, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 404, p. 228-232 5 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Silver 67%
  • proton beams 62%
  • Nanoparticles 60%
  • silver 50%
  3 被引用数 (Scopus)

• Numerical simulation of gold nanoparticles dynamics in dielectrophoretic assembly

  Nakagawara, R., Uchida, S., Shibuya, T. & Nishikawa, H., 2017, In: IEEJ Transactions on Sensors and Micromachines. 137, 4, p. 107-114 8 p.

  研究成果: Article › 査読

  • Gold nanoparticles 100%
  • Coagulation 42%
  • Electrophoresis 41%
  • Transport properties 40%
  • Computer simulation 34%
  1 被引用数 (Scopus)
• 2016

  Micro structure processing on plastics by accelerated hydrogen molecular ions

  Hayashi, H., Hayakawa, S. & Nishikawa, H., 2016 9月 2, (Accepted/In press) In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms.

  研究成果: Article › 査読

  • Protons 100%
  • hydrogen ions 94%
  • molecular ions 92%
  • Ions 76%
  • Proton beams 67%
  1 被引用数 (Scopus)
• 2015

  Development of embedded Mach-Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing

  Kada, W., Miura, K., Kato, H., Saruya, R., Kubota, A., Satoh, T., Koka, M., Ishii, Y., Kamiya, T., Nishikawa, H. & Hanaizumi, O., 2015, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 348, p. 218-222 5 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Optical waveguides 91%
  • Polydimethylsiloxane 77%
  • proton beams 62%
  • optical waveguides 60%
  7 被引用数 (Scopus)

• Three-dimensional dielectrophoresis with dielectric pillar arrays fabricated by soft lithography

  Watabe, R., Uchida, S. & Nishikawa, H., 2015 9月 1, In: IEEJ Transactions on Fundamentals and Materials. 135, 9, p. 548-552 5 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Electrophoresis 80%
  • Polydimethylsiloxane 77%
  • Lithography 67%
  • Escherichia coli 26%
• 2014

  Fabrication of polydimethylsiloxane microlens arrays on a plastic film by proton beam writing

  Kato, H., Takahashi, J. & Nishikawa, H., 2014 11月 1, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 32, 6, 06F506.

  研究成果: Article › 査読

  • Proton beams 100%
  • Plastic films 88%
  • Plastic Film 85%
  • polymeric films 78%
  • Polydimethylsiloxane 77%
  3 被引用数 (Scopus)
• 2013

  Application of proton beam writing for the direct etching of polytetrafluoroethylene for polydimethylsiloxane replica molding

  Nishikawa, H. & Hozumi, T., 2013 11月, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 31, 6, 6F403.

  研究成果: Article › 査読

  • Proton beams 100%
  • Polydimethylsiloxane 77%
  • polytetrafluoroethylene 76%
  • Polytetrafluoroethylenes 70%
  • Etching 66%
  4 被引用数 (Scopus)

• Control of refractive index of fluorinated polyimide by proton beam irradiation

  Arai, Y., Ohki, Y., Saito, K. & Nishikawa, H., 2013 1月, In: Japanese Journal of Applied Physics. 52, 1, 012601.

  研究成果: Article › 査読

  • Proton beams 100%
  • Refractive index 80%
  • Polyimides 72%
  • polyimides 63%
  • Irradiation 63%
  3 被引用数 (Scopus)

• Enhancing proton beam writing system with auto scanning software and stage movement

  Nguyen, T. P., Teshima, R., Hasegawa, T. & Nishikawa, H., 2013 2月, In: Microelectronic Engineering. 102, p. 12-17 6 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • proton beams 62%
  • Scanning 47%
  • computer programs 45%
  • Proton 40%
  1 被引用数 (Scopus)

• Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates

  Saito, K., Hayashi, H. & Nishikawa, H., 2013 1月 28, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 306, p. 284-287 4 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Fused silica 86%
  • Polydimethylsiloxane 77%
  • silica glass 70%
  • proton beams 62%
  15 被引用数 (Scopus)
• 2012

  Fabrication of Concave and Convex Structure Array Consisted of Epoxy Long-Nanowires by Light and Heavy Ion Beams Lithography

  Takano, K., Sugimoto, M., Asano, A., Maeyoshi, Y., Marui, H., Omichi, M., Saeki, A., Seki, S., Satoh, T., Kamiya, Y. I., Koka, M., Ohkubo, T. & Nishikawa, H., 2012 2月 1, In: Transactions of Materials Research Society of Japan. 37, p. 237-240

  研究成果: Article › 査読

  30 被引用数 (Scopus)

• Fabrication of Poly(9,90-dioctylfluorene)-Based Nano- and Microstructures by Proton Beam Writing

  Maeyoshi, Y., Takano, K., Asano, A., Marui, H., Omichi, M., Satoh, T., Kamiya, T., Ishii, Y., Ohkubo, T., Koka, M., Kada, W., Sugimoto, M., Nishikawa, H., Saeki, A. & Seki, S., 2012 4月 25, In: Jpn. J. Appl. Phys.. 51, p. 045201/1-045201/4

  研究成果: Article › 査読

• Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

  Maeyoshi, Y., Takano, K., Asano, A., Marui, H., Omichi, M., Satoh, T., Kamiya, T., Ishii, Y., Ohkubo, T., Koka, M., Kada, W., Sugimoto, M., Nishikawa, H., Saeki, A. & Seki, S., 2012 4月, In: Japanese Journal of Applied Physics. 51, 4 PART 1, 045201.

  研究成果: Article › 査読

  • Proton beams 100%
  • Nanostructures 75%
  • proton beams 62%
  • fluence 51%
  • adjusting 49%
  1 被引用数 (Scopus)

• Microprocessing of arched bridge structures with epoxy resin by proton beam writing

  Takano, K., Asano, A., Maeyoshi, Y., Marui, H., Omichi, M., Saeki, A., Seki, S., Satoh, T., Ishii, Y., Kamiya, T., Koka, M., Ohkubo, T., Sugimoto, M. & Nishikawa, H., 2012, In: Journal of Photopolymer Science and Technology. 25, 1, p. 43-46 4 p.

  研究成果: Article › 査読
  2 被引用数 (Scopus)

• Optical counting of trapped bacteria in dielectrophoretic microdevice with pillar array

  Uchida, S., Nakao, R., Asai, C., Jin, T., Shiine, Y. & Nishikawa, H., 2012 1月, In: Intelligent Automation and Soft Computing. 18, 2, p. 165-176 12 p.

  研究成果: Article › 査読

  • Bacteria 100%
  • Counting 69%
  • Water Pollution 34%
  • Microchannel 33%
  • Water pollution 29%
  2 被引用数 (Scopus)

• Visualization of focused proton beam dose distribution by atomic force microscopy using blended polymer films based on polyacrylic acid

  Omichi, M., Takano, K., Satoh, T., Kamiya, T., Ishii, Y., Ohkubo, T., Koka, M., Kada, W., Sugimoto, M., Nishikawa, H. & Seki, S., 2012 9月 1, In: Journal of Nanoscience and Nanotechnology. 12, 9, p. 7401-7404 4 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Polymer films 81%
  • Atomic force microscopy 78%
  • proton beams 62%
  • Acids 56%
  2 被引用数 (Scopus)
• 2011

  Electroforming of Ni mold for imprint lithography using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

  Tanabe, Y., Nishikawa, H., Seki, Y., Satoh, T., Ishii, Y., Kamiya, T., Watanabe, T. & Sekiguchi, A., 2011 8月, In: Microelectronic Engineering. 88, 8, p. 2145-2148 4 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Electroforming 95%
  • electroforming 85%
  • Lithography 67%
  • high aspect ratio 66%
  14 被引用数 (Scopus)

• Fabrication of silica-based three-dimensional structures by changing fluence using proton beam writing

  Tsuchiya, R. & Nishikawa, H., 2011 9月 1, In: Transactions of the Materials Research Society of Japan. 36, p. 325-328

  研究成果: Article › 査読

• Microbeam complex at TIARA: Technologies to meet a wide range of applications

  Kamiya, T., Takano, K., Satoh, T., Ishii, Y., Nishikawa, H., Seki, S., Sugimoto, M., Okumura, S. & Fukuda, M., 2011 10月 15, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 269, 20, p. 2184-2188 5 p.

  研究成果: Article › 査読

  • microbeams 100%
  • Ion beams 75%
  • Ions 49%
  • Particle beams 43%
  • Cyclotrons 39%
  15 被引用数 (Scopus)

• Microbeam complex at TIARA: Technologies to meet a wide range of applications

  Kamiya, T., Takano, K., Satoh, T., Ishii, Y., Nishikawa, H., Seki, S., Sugimoto, M., Okumura, S. & Fukuda, M., 2011 10月 15, In: Nuclear Instruments and Methods in Physics Research B. 269, p. 2184-2188

  研究成果: Article › 査読

  15 被引用数 (Scopus)

• Micromachining of Polyimide Films by Proton Beam Writing

  Takeno, Y., Nishikawa, H. & Hayashi, H., 2011 6月 1, In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams, Paper No. (June 2011).

  研究成果: Article › 査読

• Micro processing of poly L lactic acid (PLLA) by proton beam writing

  Takeuchi, H., Koike, Y., Ogura, T., Hagiwara, H. & Nishikawa, H., 2011 6月 1, In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB.

  研究成果: Article › 査読

• Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species

  Takano, K., Satoh, T., Ishii, Y., Koka, M., Kamiya, T., Ohkubo, T., Sugimoto, M., Nishikawa, H. & Seki, S., 2011 9月 1, In: Transactions of the Materials Research Society of Japan. 36, p. 305-308

  研究成果: Article › 査読

• Negative Epoxy Resist for Permanent Use Optimized for Proton Beam Writing

  Nishikawa, H., Nishiura, T., Mita, T. & Takemori, T., 2011 6月 1, In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB.

  研究成果: Article › 査読

• Surface Modifications and Micromachining of Diamond by Proton Beam Writing

  Harashima, Y., Kaneko, T., Nishikawa, H., Kato, H. & Yamasaki, S., 2011 6月 1, In: International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium BB, Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams.

  研究成果: Article › 査読
• 2010

  Controlling Spatial Curing Reactions of Epoxy Resin Systems on Ion Beam Writing

  Takano, K., Satoh, T., Koka, M., Kamiya, T., Ishii, Y., Ohkubo, T., Sugimoto, M., Nishikawa, H. & Seki, S., 2010 7月 1, In: 12th International Conference on Nuclear Microprobe Technology and Applications, Book of Abstracts. p. 173

  研究成果: Article › 査読

• Curing Reaction of SU-8 Negative-type Photoresist by MeV Ion Beam Lithography

  Takano, K., Kamiya, T., Sugimoto, M., Seki, S., Satoh, T., Ishii, Y., Ohkubo, T., Koka, M. & Nishikawa, H., 2010 6月 24, In: 27th International Conference of Photopolymer Science and Technology (ICPST-27).

  研究成果: Article › 査読

• Electroforming of Ni mold using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

  Tanabe, Y., Nishikawa, H., Satoh, T., Ishii, Y., Kamiya, T., Watanabe, T. & Sekiguchi, A., 2010 9月 1, In: 36th International Conference on Micro & Nano Engineering (MNE),(Genoa, Italy, 19-22 September 2010).

  研究成果: Article › 査読

• Fabrication of Three-Dimensional Pillar Arrays by PBW for Improved Trapping Performance of Dielectrophoretic Devices

  Shiine, Y., Sakashita, Y., Nishikawa, H., Satoh, T., Ishii, Y., Kamiya, T., Nakao, R. & Uchida, S., 2010 7月 1, In: 12th International Conference on Nuclear Microprobe Technology and Applications, Book of Abstracts. p. 150

  研究成果: Article › 査読

• Irradiation Effects on Diamond by Focused Proton Beam

  Kaneko, T., Harashima, Y., Nishikawa, H., Kato, H. & Yamasaki, S., 2010 7月 1, In: 12th International Conference on Nuclear Microprobe Technology and Applications, Book of Abstracts. p. 159

  研究成果: Article › 査読

• Local Nano-processing of Epoxy Resin Systems by Single Ion Hits with Writing

  Takano, K., Satoh, T., Ishii, Y., Kamiya, T., Ohkubo, T., Koka, M., Sugimoto, M., Seki, S. & Nishikawa, H., 2010 7月 1, In: 12th International Conference on Nuclear Microprobe Technology and Applications, Book of Abstracts. p. 133

  研究成果: Article › 査読

• Microbeam Complex in TIARA: Technologies to Meet Wide Range of Applications

  Kamiya, T., Takano, K., Satoh, T., Ishii, Y., Okumura, S., Nishikawa, H., Seki, S., Sugimoto, M., Yokota, W. & Fukuda, M., 2010 7月 1, In: 12th International Conference on Nuclear Microprobe Technology and Applications, Book of Abstracts. p. 40

  研究成果: Article › 査読

• Micro-patterning of thick Siloxane films by Proton Beam Writing

  Tsuchiya, R. & Nishikawa, H., 2010 12月 10, In: Default journal.

  研究成果: Article › 査読

• Soft-lithographic methods for the fabrication of dielectrophoretic devices using molds by proton beam writing

  Shiine, Y., Nishikawa, H., Furuta, Y., Kanamitsu, K., Satoh, T., Ishii, Y., Kamiya, T., Nakao, R. & Uchida, S., 2010 5月, In: Microelectronic Engineering. 87, 5-8, p. 835-838 4 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Molds 71%
  • Fluidics 71%
  • proton beams 62%
  • fluidics 54%
  8 被引用数 (Scopus)

• Y-Junction Waveguides for 1.5-μm Band Fabricated by Proton Beam Writing

  Uehara, M., Kiryu, H., Miura, K., Hanaizumi, O., Satoh, T., Ishii, Y., Takano, K., Ohkubo, T., Kohka, M., Yamazaki, A., Kada, W., Yokoyama, A., Kamiya, T. & Nishikawa, H., 2010 12月 1, In: 2nd International Conference on Advanced Micro-Device Engineering (AMDE2010).

  研究成果: Article › 査読
• 2009

  Applications of microstructures fabricated by proton beam writing to electric-micro filters

  Furuta, Y., Nishikawa, H., Satoh, T., Ishii, Y., Kamiya, T., Nakao, R. & Uchida, S., 2009 6月 15, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 267, 12-13, p. 2285-2288 4 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Escherichia coli 78%
  • yeast 74%
  • Yeast 73%
  • high aspect ratio 66%
  16 被引用数 (Scopus)

• Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

  Shiine, Y., Nishikawa, H., Furuta, Y., Sato, T., Ishii, Y., Kamiya, T., Nakao, R. & Uchida, S., 2009 9月 1, In: Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009).

  研究成果: Article › 査読

• Development of micromachining technology in ion microbeam system at TIARA, JAEA

  Kamiya, T., Nishikawa, H., Satoh, T., Haga, J., Oikawa, M., Ishii, Y., Ohkubo, T., Uchiya, N. & Furuta, Y., 2009 3月, In: Applied Radiation and Isotopes. 67, 3, p. 488-491 4 p.

  研究成果: Article › 査読

  • microbeams 100%
  • micromachining 89%
  • nuclear energy 86%
  • Japan 82%
  • electroplating 48%
  4 被引用数 (Scopus)

• Electroplating using high-aspect-ratio microstructures fabricated by proton beam writing

  Seki, Y., Furuta, Y., Nishikawa, H., Watanabe, T., Nakata, T., Satoh, T., Ishii, Y. & Kamiya, T., 2009 4月 1, In: Microelectronic Engineering. 86, 4-6, p. 945-948 4 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Electroplating 75%
  • electroplating 74%
  • high aspect ratio 66%
  • proton beams 62%
  8 被引用数 (Scopus)

• Fabrication and evaluation of 3D-electric micro filters using proton beam writing

  Furuta, Y., Nishikawa, H., Satoh, T., Ishii, Y., Kamiya, T., Nakao, R. & Uchida, S., 2009 4月 1, In: Microelectronic Engineering. 86, 4-6, p. 1396-1400 5 p.

  研究成果: Article › 査読

  • Proton beams 100%
  • Dielectrophoresis 82%
  • Electrophoresis 80%
  • proton beams 62%
  • Fabrication 45%
  15 被引用数 (Scopus)

• Fabrication of Dielectrophoretic Devices Using Poly-dimethylsiloxane Microstructures by Proton Beam Writing

  Shiine, Y., Nishikawa, H., Furuta, Y., Kanamitsu, K., Satoh, T., Ishii, Y., Kamiya, T., Nakao, R. & Uchida, S., 2009 9月 1, In: Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE), (Ghent, Belgium, 28 Sep. to 1 Oct. 2009)..

  研究成果: Article › 査読

• Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA

  Kamiya, T., Takano, K., Ishii, Y., Satoh, T., Oikawa, M., Ohkubo, T., Haga, J., Nishikawa, H., Furuta, Y., Uchiya, N., Seki, S. & Sugimoto, M., 2009 6月 15, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 267, 12-13, p. 2317-2320 4 p.

  研究成果: Article › 査読

  • Heavy ions 100%
  • microbeams 87%
  • Nanowires 87%
  • Lithography 76%
  • Ion beam lithography 70%
  7 被引用数 (Scopus)

• Micro-Nano Lithography by MeV Ion Beam Writing

  Takano, K., Satoh, T., Ishii, Y., Kamiya, T., Ohkubo, T., Sugimoto, M., Koka, M., Nishikawa, H. & Seki, S., 2009 9月 1, In: Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB2009-September 13-18, 2009).

  研究成果: Article › 査読