A Development of Micro-Machined Micro Ion Source for Flexible and Concurrent MEMS Process

Tomoyuki Ueda, Shinya Tamonoki, Tatsuya Suzuki, Sumito Nagasawa, Hiroki Kuwano

研究成果: Article › 査読

本文言語	English
ページ（範囲）	41
ジャーナル	Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)
出版ステータス	Published - 2010 6月 29

引用スタイル

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AU - Ueda, Tomoyuki

AU - Tamonoki, Shinya

AU - Suzuki, Tatsuya

AU - Nagasawa, Sumito

AU - Kuwano, Hiroki

PY - 2010/6/29

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JO - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)

JF - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010)

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