抄録
A diamond-like carbon (DLC) film, coated on an SKD11 (alloy tool steel) substrate, was shaped by plasma oxidation to form an assembly of DLC macro-pillars and to be used as a DLC-punch array that is micro-embossed into aluminum sheets. First, the SKD11 steel die substrate was prepared and DLC-coated to have a film thickness of 10 μm. This DLC coating worked as a punch material. The two-dimensional micro-patterns were printed onto this DLC film by maskless lithography. The unprinted DLC films were selectively removed by plasma oxidation to leave the three-dimensional DLC-punch array on the SKD11 substrate. Each DLC punch had a head of 3.5 μm × 3.5 μm and a height of 8 μm. This DLC-punch array was fixed into the cassette die set for amicro-embossing process using a table-top servo-stamper. Furthermore, through numerically controlled micro-embossing, an alignment of rectangular punches was transcribed into a micro-cavity array in the aluminum sheet. The single micro-cavity had a bottom surface of 3.2 μm × 3.2 μm and an average depth of 7.5 μm. A heat-transfer experiment in boiling water was also performed to investigate the effect ofmicro-cavity texture on bubbling behavior and the boiling curve.
本文言語 | English |
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論文番号 | 147 |
ジャーナル | Micromachines |
巻 | 9 |
号 | 4 |
DOI | |
出版ステータス | Published - 2018 3月 25 |
ASJC Scopus subject areas
- 制御およびシステム工学
- 機械工学
- 電子工学および電気工学