A Fully Planarized Multilevel Interconnection Technology Using Selective TEOS-Ozone APCVD

M.Suzuki M.Suzuki, T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma

研究成果: Article › 査読

本文言語	English
ページ（範囲）	293-296
ジャーナル	Proceedings of IEEE International Electron Devices Meeting
出版ステータス	Published - 1992 12月 13

引用スタイル

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title = "A Fully Planarized Multilevel Interconnection Technology Using Selective TEOS-Ozone APCVD",

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AU - Homma, Tetsuya

PY - 1992/12/13

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JO - Proceedings of IEEE International Electron Devices Meeting

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