TY - JOUR
T1 - A multi-transducer near field acoustic levitation system for noncontact transportation of large-sized planar objects
AU - Amano, Takafumi
AU - Koike, Yoshikazu
AU - Nakamura, Kentaro
AU - Ueha, Sadayuki
AU - Hashimoto, Yoshiki
PY - 2000
Y1 - 2000
N2 - A new noncontact transportation system, which consists of multiple ultrasonic transducers and operates based on near-field acoustic levitation, is proposed to transport a large-sized planar object such as a glass substrate for liquid crystal devices. Using the proposed systems consisting of two and three transducers, the suspension characteristics of the levitated objects are studied as functions of both size difference and angles between the vibration systems and the levitated object. As a result, the holding force is proved to increase as the angle increases and is maximum when the horizontal dimensions of the system and the object coincide.
AB - A new noncontact transportation system, which consists of multiple ultrasonic transducers and operates based on near-field acoustic levitation, is proposed to transport a large-sized planar object such as a glass substrate for liquid crystal devices. Using the proposed systems consisting of two and three transducers, the suspension characteristics of the levitated objects are studied as functions of both size difference and angles between the vibration systems and the levitated object. As a result, the holding force is proved to increase as the angle increases and is maximum when the horizontal dimensions of the system and the object coincide.
KW - Acoustic levitation
KW - Actuator
KW - High power ultrasonics
KW - Noncontact suspension
KW - Noncontact transportation
KW - Radiation pressure
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U2 - 10.1143/jjap.39.2982
DO - 10.1143/jjap.39.2982
M3 - Article
AN - SCOPUS:0033705741
SN - 0021-4922
VL - 39
SP - 2982
EP - 2985
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 5 B
ER -