A Statistical Process Control Method for Semiconductor Manufacturing

Tomoaki Kubo, Tomomi Ino, Masateru Minami, Tetsuya Homma

研究成果: Article › 査読

本文言語	English
ページ（範囲）	246-254
ジャーナル	SICE Journal of Control and Measurement System Integration
巻	2
出版ステータス	Published - 2009 8月 3

引用スタイル

@article{26904b2c605e4377a2f5b27a65fc9aca,

title = "A Statistical Process Control Method for Semiconductor Manufacturing",

author = "Tomoaki Kubo and Tomomi Ino and Masateru Minami and Tetsuya Homma",

year = "2009",

month = aug,

day = "3",

language = "English",

volume = "2",

pages = "246--254",

journal = "SICE Journal of Control and Measurement System Integration",

}