Adaptive control for piezo-actuated XY-table

Xinkai Chen; Makoto Hattori

doi:10.1109/ICMA.2011.5986303

Adaptive control for piezo-actuated XY-table

研究成果: Conference contribution

抄録

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

本文言語	English
ホスト出版物のタイトル	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
ページ	2089-2094
ページ数	6
DOI	https://doi.org/10.1109/ICMA.2011.5986303
出版ステータス	Published - 2011 11月 17
イベント	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China 継続期間: 2011 8月 7 → 2011 8月 10

出版物シリーズ

名前	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011

Conference

Conference	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
国/地域	China
City	Beijing
Period	11/8/7 → 11/8/10

ASJC Scopus subject areas

人工知能
電子工学および電気工学
機械工学

文献へのアクセス

10.1109/ICMA.2011.5986303

他のファイルとリンク

引用スタイル

Chen, X & Hattori, M 2011, Adaptive control for piezo-actuated XY-table. in 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011., 5986303, 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011, pp. 2089-2094, 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011, Beijing, China, 11/8/7. https://doi.org/10.1109/ICMA.2011.5986303

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title = "Adaptive control for piezo-actuated XY-table",

abstract = "The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.",

keywords = "XY-table, high precision control, hysteresis, piezo electric actuators",

author = "Xinkai Chen and Makoto Hattori",

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language = "English",

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AU - Hattori, Makoto

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N2 - The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

AB - The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

KW - XY-table

KW - high precision control

KW - hysteresis

KW - piezo electric actuators

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Adaptive control for piezo-actuated XY-table

抄録

出版物シリーズ

Conference

ASJC Scopus subject areas

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