This study aims at discussing the methods which could measure effectively the ionic compounds using Si surface on the condition of electric field. Due to the difficulty of measuring the ionic and non-ionic compounds separately, the chemical and physical characteristics are still unknown. As the first step of the study, the authors carried out experiments to analyze the airborne compounds under an electric field with various field strengths. For the experimental apparatus, the clean chamber was set up with the corona discharge type ionizer, discharger of chemical component, witness plate for testing and tool for setting electric field. The exposure experiment was performed to select the test compounds and the adsorbent. As the test chemicals for exposure experiments, toluene and LMCS (Low-molecular-weight cyclo-dimethyl-siloxane) were used. Shattered or cut silicon wafer was mainly used for adsorbent of chemical components. GC/MS (Gas Chromatograph Mass Spectrometer) was used to analyze ionic compounds. The experiments were conducted using the conditions of ionizer (+, -, off), and electric field (+, -, off) as the basis. For the results of the exposure experiment, which was required in order to select the correct test compounds and the test surface, comminuted silicon wafer maintain a higher possibility of adsorption compared to the cut silicon wafer in regards to processed silicon product. Results of the measurement using comminuted Si-wafer surface which was charged with same polarity of ionic compounds, the increase in LMCS'adsorption was confirmed in comparison with the results of the measurement within the non charged condition.
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