Analysis of GaInAsP surfaces by contact-angle measurement for wafer direct bonding with garnet crystals
Hideki Yokoi, Tetsuya Mizumoto, Masafumi Shimizu, Takashi Waniishi, Naoki Futakuchi, Noriaki Kaida, Yoshiaki Nakano
研究成果: Article › 査読
22
被引用数
(Scopus)