Application of proton beam writing for the direct etching of polytetrafluoroethylene for polydimethylsiloxane replica molding

Engineering & Materials Science

• Proton beams 100%
• Polydimethylsiloxane 77%
• Polytetrafluoroethylenes 70%
• Etching 66%
• Molding 62%
• Micromachining 21%
• Protons 10%
• Molds 10%
• Fourier transforms 8%
• Electron microscopes 8%
• Vacuum 7%
• Heat treatment 7%
• Infrared radiation 7%
• Scanning 6%
• Decomposition 6%
• Chemical analysis 5%
• Air 4%
• Temperature 3%

Physics & Astronomy

• polytetrafluoroethylene 76%
• replicas 65%
• proton beams 62%
• etching 46%
• micromachining 19%
• fluence 14%
• heat treatment 7%
• electron microscopes 6%
• decomposition 6%
• protons 5%
• vacuum 5%
• scanning 5%
• air 5%
• temperature 2%