Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

Shigeki Matsuo; Takashi Miyamoto; Takuro Tomita; Shuichi Hashimoto

doi:10.1364/AO.46.008264

Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

Shigeki Matsuo, Takashi Miyamoto, Takuro Tomita, Shuichi Hashimoto

研究成果: Article › 査読

18 被引用数 (Scopus)

抄録

We report the simultaneous multipoint fabrication of polymer rods by the femtosecond laser processing of a negative photoresist using a microlens array (MLA). The rods were periodically arranged in the form of an array corresponding to the MLA and free-standing on a glass substrate. The use of a photomask enabled us to define the contour of the rod array. Furthermore, sample translation techniques were demonstrated for the effective fabrication of large-area structures.

本文言語	English
ページ（範囲）	8264-8267
ページ数	4
ジャーナル	Applied Optics
巻	46
号	34
DOI	https://doi.org/10.1364/AO.46.008264
出版ステータス	Published - 2007 12月 1
外部発表	はい

ASJC Scopus subject areas

原子分子物理学および光学
工学（その他）
電子工学および電気工学

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10.1364/AO.46.008264

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Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

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