Behavior of Reaction Products during Puddle Development in Fabrication of Ultra-large Scale Integrations

研究成果: Article › 査読

本文言語	English
ページ（範囲）	H764-H768
ジャーナル	Journal of the Electrochemical Society
巻	154
出版ステータス	Published - 2007 9月 1

引用スタイル

@article{058ddbb776b44af6bfa6e07930f85a94,

title = "Behavior of Reaction Products during Puddle Development in Fabrication of Ultra-large Scale Integrations",

author = "H. Eto and Homma, {H. Eto;Y.Ito;T.}",

year = "2007",

month = sep,

day = "1",

language = "English",

volume = "154",

pages = "H764--H768",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

}