Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope

Peng Wang, Gavin Behan, Angus I. Kirkland, Peter D. Nellist, Eireann C. Cosgriff, Adrian J. D'Alfonso, Andrew J. Morgan, Leslie J. Allen, Ayako Hashimoto, Masaki Takeguchi, Kazutaka Mitsuishi, Masayuki Shimojo

研究成果: Article査読

19 被引用数 (Scopus)

抄録

Scanning confocal electron microscopy (SCEM) offers a mechanism for three-dimensional imaging of materials, which makes use of the reduced depth of field in an aberration-corrected transmission electron microscope. The simplest configuration of SCEM is the bright-field mode. In this paper we present experimental data and simulations showing the form of bright-field SCEM images. We show that the depth dependence of the three-dimensional image can be explained in terms of two-dimensional images formed in the detector plane. For a crystalline sample, this so-called probe image is shown to be similar to a conventional diffraction pattern. Experimental results and simulations show how the diffracted probes in this image are elongated in thicker crystals and the use of this elongation to estimate sample thickness is explored.

本文言語English
ページ(範囲)877-886
ページ数10
ジャーナルUltramicroscopy
111
7
DOI
出版ステータスPublished - 2011 6月
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 器械工学

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