Changes in the optical properties of Ge-doped silica glass during exposure to a KrF excimer laser

Engineering & Materials Science

• Excimer lasers 100%
• Fused silica 90%
• Optical properties 80%
• Hydrogen 51%
• Diffraction efficiency 38%
• Diffraction gratings 33%
• Laser beam effects 32%
• Refractive index 28%
• Masks 20%
• Temperature 8%

Physics & Astronomy

• silica glass 73%
• excimer lasers 64%
• optical properties 41%
• hydrogen 23%
• ultraviolet radiation 12%
• masks 10%
• attenuation 9%
• gratings 9%
• refractivity 8%
• irradiation 8%
• room temperature 7%
• profiles 6%
• diffraction 6%
• pulses 6%
• lasers 5%

Chemical Compounds

• Excimer 70%
• Refractive Index 62%
• Optical Property 47%
• Glass 44%
• Ambient Reaction Temperature 36%
• Hydrogen 32%