Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System
Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryouichi Takayama, Shuji Tanaka
研究成果: Conference contribution
14
被引用数
(Scopus)