@inproceedings{b2c55b1b8aa442998ab4e1ab6aec81e8,
title = "Characterization of magnetic nanostructures fabricated by electron beam induced-chemical vapor deposition with iron carbonyl gas",
author = "M. Takeguchi and M. Shimojo and K. Mitsuishi and M. Tanaka and K. Furuya",
year = "2004",
doi = "10.1109/imnc.2004.245723",
language = "English",
isbn = "4990247205",
series = "Digest of Papers - Microprocesses and Nanotechnology 2004",
publisher = "The Japan Society of Applied Physics",
pages = "62--63",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2004",
note = "2004 International Microprocesses and Nanotechnology Conference ; Conference date: 26-10-2004 Through 29-10-2004",
}