TY - JOUR
T1 - Characterization of refractive index changes of silica glass induced by ion microbeam
AU - Hattori, M.
AU - Ohki, Y.
AU - Fujimaki, M.
AU - Souno, T.
AU - Nishikawa, H.
AU - Watanabe, E.
AU - Oikawa, M.
AU - Kamiya, T.
AU - Arakawa, K.
N1 - Funding Information:
This work was performed under the JAERI-Cooperation Research Program at TIARA. It was partly supported by a Grant-in-Aid for Scientific Research (no. 12750278) from Japan Society for the Promotion of Science and by Iketani Foundation.
PY - 2003/9
Y1 - 2003/9
N2 - Distributions of structural and refractive index changes of silica irradiated by H+ microbeam were studied by optical and atomic force microscopes (AFM). The AFM measurements on the microbeam irradiated area show the formation of a groove on the surface. In addition, a cross sectional observation on the surface parallel to the incident plane reveals surface deformation along the ion tracks, which is deepest at the projected range of ions. Taking into account the possible structural changes of silica induced by energy deposition calculated by TRIM, the measured topological changes at the front and side surfaces result from internal compaction of silica glass. Refractive index changes were estimated from the Lorentz-Lorenz relationship using the distribution of the internal compaction estimated by the AFM measurements.
AB - Distributions of structural and refractive index changes of silica irradiated by H+ microbeam were studied by optical and atomic force microscopes (AFM). The AFM measurements on the microbeam irradiated area show the formation of a groove on the surface. In addition, a cross sectional observation on the surface parallel to the incident plane reveals surface deformation along the ion tracks, which is deepest at the projected range of ions. Taking into account the possible structural changes of silica induced by energy deposition calculated by TRIM, the measured topological changes at the front and side surfaces result from internal compaction of silica glass. Refractive index changes were estimated from the Lorentz-Lorenz relationship using the distribution of the internal compaction estimated by the AFM measurements.
KW - Atomic force microscope
KW - Compaction
KW - Ion microbeam
KW - Refractive index change
KW - Silica glass
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U2 - 10.1016/S0168-583X(03)01030-9
DO - 10.1016/S0168-583X(03)01030-9
M3 - Conference article
AN - SCOPUS:0042513863
SN - 0168-583X
VL - 210
SP - 272
EP - 276
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
T2 - 8th International Conference on Nuclear Microprobe Technology
Y2 - 8 September 2002 through 13 September 2002
ER -