Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD

Shimada Shimada; S S; S. S.; Takahashi Takahashi; M. M.; Kiyono Kiyono; H. H.; Tsujino Tsujino; J. J.

Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD

Shimada Shimada, S S, S. S., Takahashi Takahashi, M. M., Kiyono Kiyono, H. H., Tsujino Tsujino, J. J.

地域環境システム専攻

研究成果: Article › 査読

本文言語	English
ページ（範囲）	6616-6621
ジャーナル	Thin Solid Films
巻	516
出版ステータス	Published - 2008 1月 1

引用スタイル

@article{34d055f9b6cb466d85d59a17b3c9ef04,

title = "Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD",

author = "Shimada Shimada and S S and S. S. and Takahashi Takahashi and M. M. and Kiyono Kiyono and H. H. and Tsujino Tsujino and J. J.",

year = "2008",

month = jan,

day = "1",

language = "English",

volume = "516",

pages = "6616--6621",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD

AU - Shimada, Shimada

AU - S, S

AU - S., S.

AU - Takahashi, Takahashi

AU - M., M.

AU - Kiyono, Kiyono

AU - H., H.

AU - Tsujino, Tsujino

AU - J., J.

PY - 2008/1/1

Y1 - 2008/1/1

M3 - Article

SN - 0040-6090

VL - 516

SP - 6616

EP - 6621

JO - Thin Solid Films

JF - Thin Solid Films

ER -