Cold coating of magnesium base alloy films by ion beam sputtering

Atsushi Mitsuo, Tatsuhiko Aizawa

研究成果: Conference article査読

4 被引用数 (Scopus)


An ion beam sputtering (IBS) system has been developed to synthesize various magnesium alloy thin films. Different from the conventional coating methods suffering from the high-energy ion bombardment or high heat flux damage, this technique is free from those radiation damages in coating. In addition, any substrates, rather weak to radiation and heating damages, can be used; this process can be just called "Cold Coating" in the present paper. This technique has a significant advantage in practice, being free from an ion collision, a thermal effect or the radiation damage from the generated plasma. Incident argon ions to the target were generated by an electron cyclotron resonance (ECR) source. In order to control the concentration ratio of transition elements (TM) to magnesium in film, the target area ratio was changed with the combination of pure metal target plates. Deposited magnesium alloy films were characterized by EDX, XRD and TEM. Various concentrations of Mg alloy films were obtained with 10 to 90 mol% TM. Through XRD analysis, an amorphous-like thin film can be fabricated. Cross-sectional TEM observation showed that the Mg-Ni film deposited on silicon wafer substrates had two different regions of crystal structures. One is a columnar structure near the substrate and the other is an equiaxed-crystalline with fine grain. It was confirmed that the composition and crystal structure of magnesium alloy films could be controlled by the target area ratios of TM to Mg.

ジャーナルMaterials Science Forum
出版ステータスPublished - 2003 1月 1
イベントProceedings of the Second Osaka International Conference on Platform Science and Technology for Advanced Magnesium Alloys 2003 - Osaka, Japan
継続期間: 2003 1月 262003 1月 30

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学


「Cold coating of magnesium base alloy films by ion beam sputtering」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。