Concurrent reactive ion etching employing micromachined ionic liquid ion source array

Engineering & Materials Science

• Ion sources 100%
• Ionic liquids 90%
• Reactive ion etching 88%
• Etching 41%
• Ions 35%
• Silicon 30%
• Ion beams 18%
• Substrates 18%
• Focused ion beams 18%
• Fluorine 17%
• Spectroscopy 14%
• Needles 13%
• Electric potential 13%
• Chemical reactions 12%

Physics & Astronomy

• ion sources 64%
• etching 49%
• liquids 34%
• ions 30%
• silicon 20%
• ion beams 20%
• electric potential 14%
• needles 13%
• fluorine 13%
• mass spectroscopy 12%
• chemical reactions 11%
• emitters 10%

Chemical Compounds

• Etching 58%
• Ionic Liquid 49%
• Ion Beam 28%
• Ion 25%
• Voltage 18%
• 1-Ethyl-3-Methylimidazolium 15%
• Needle Like Crystal 13%
• Fluorine Atom 11%
• Mass Spectrometry 8%
• Time 4%