TY - GEN
T1 - Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition
AU - Yoshida, S.
AU - Kobayashi, T.
AU - Kumano, M.
AU - Esashi, M.
PY - 2011
Y1 - 2011
N2 - This study reports on the investigation of the conformability and photo and electron beam (EB) patternability of a poly-glycidyl methacrylate (PGMA) film formed by initiated chemical vapor deposition (i-CVD). It is demonstrated that the PGMA film can be conformally deposited on a Si trench structure via i-CVD. In addition, the pattern definition of the film is also successfully demonstrated by deep ultraviolet and EB lithography. These achievements indicate that i-CVD has the potential to become a powerful method to achieve the conformal coating of a lithographic resist.
AB - This study reports on the investigation of the conformability and photo and electron beam (EB) patternability of a poly-glycidyl methacrylate (PGMA) film formed by initiated chemical vapor deposition (i-CVD). It is demonstrated that the PGMA film can be conformally deposited on a Si trench structure via i-CVD. In addition, the pattern definition of the film is also successfully demonstrated by deep ultraviolet and EB lithography. These achievements indicate that i-CVD has the potential to become a powerful method to achieve the conformal coating of a lithographic resist.
KW - Conformal coating
KW - Initiated chemical vapor deposition
KW - Poly-glycidyl methacrylate
KW - Resist coating technology
UR - http://www.scopus.com/inward/record.url?scp=80052121359&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80052121359&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2011.5969537
DO - 10.1109/TRANSDUCERS.2011.5969537
M3 - Conference contribution
AN - SCOPUS:80052121359
SN - 9781457701573
T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
SP - 994
EP - 997
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Y2 - 5 June 2011 through 9 June 2011
ER -