Current enhanced solid phase precipitation (CE-SPP) for direct deposition of multilayer graphene on SiO2 from a Cu capped Co-C layer

Hiroyasu Ichikawa; Kazuyoshi Ueno

doi:10.1109/EDTM.2017.7947583

Current enhanced solid phase precipitation (CE-SPP) for direct deposition of multilayer graphene on SiO₂ from a Cu capped Co-C layer

研究成果: Conference contribution

抄録

To improve the crystallinity of multilayer graphene (MLG) directly deposited on SiO₂ for interconnect applications, a new solid phase precipitation (SPP) process involving current stress is investigated. It is found that the MLG crystallinity precipitated from a Cu capped Co-C layer can be improved by the vertical current to the Cu/Co-C but not by the horizontal current. The current enhanced SPP (CE-SPP) is expected as a mean to improve the MLG crystallinity directly deposited on SiO₂.

本文言語	English
ホスト出版物のタイトル	2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	244-246
ページ数	3
ISBN（電子版）	9781509046591
DOI	https://doi.org/10.1109/EDTM.2017.7947583
出版ステータス	Published - 2017 6月 13
イベント	2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Toyama, Japan 継続期間: 2017 2月 28 → 2017 3月 2

Other

Other	2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017
国/地域	Japan
City	Toyama
Period	17/2/28 → 17/3/2

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学

文献へのアクセス

10.1109/EDTM.2017.7947583

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引用スタイル

Ichikawa, H., & Ueno, K. (2017). Current enhanced solid phase precipitation (CE-SPP) for direct deposition of multilayer graphene on SiO₂ from a Cu capped Co-C layer. In 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings (pp. 244-246). [7947583] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDTM.2017.7947583

Current enhanced solid phase precipitation (CE-SPP) for direct deposition of multilayer graphene on SiO₂ from a Cu capped Co-C layer. / Ichikawa, Hiroyasu; Ueno, Kazuyoshi.
2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. p. 244-246 7947583.

研究成果: Conference contribution

Ichikawa, H & Ueno, K 2017, Current enhanced solid phase precipitation (CE-SPP) for direct deposition of multilayer graphene on SiO₂ from a Cu capped Co-C layer. in 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings., 7947583, Institute of Electrical and Electronics Engineers Inc., pp. 244-246, 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017, Toyama, Japan, 17/2/28. https://doi.org/10.1109/EDTM.2017.7947583

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