Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers

Tuan Anh Phan; Motoaki Hara; Hiroyuki Oguchi; Hiroki Kuwano

doi:10.1016/j.mee.2015.02.043

Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers

Tuan Anh Phan, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Article › 査読

21 被引用数 (Scopus)

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We report on the development of MEMS current sensors composed of Fe_67.5B_22.5Nd_6.3Nb_3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free-standing cantilever structures that benefit from the superior mechanical properties of the metallic glass, such as high fracture toughness and high yield strength. The resonant frequency of the proposed FBNN cantilever was 3.85 kHz in the fundamental flexure mode when the length, width and thickness of the cantilever were 750 μm, 150 μm and 3 μm, respectively. A feed wire with a diameter of 500 μm was placed close to the FBNN cantilever, and a downshift in the resonance peak was observed when the current intensity through the feed wire increased. The sensitivity of this frequency shift to the current intensity was 5.0 √Hz/A when the distance between the cantilever and the wire was 500 μm.

本文言語	English
ページ（範囲）	28-31
ページ数	4
ジャーナル	Microelectronic Engineering
巻	135
DOI	https://doi.org/10.1016/j.mee.2015.02.043
出版ステータス	Published - 2015 3月 5
外部発表	はい

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
原子分子物理学および光学
凝縮系物理学
表面、皮膜および薄膜
電子工学および電気工学

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10.1016/j.mee.2015.02.043

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title = "Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers",

abstract = "We report on the development of MEMS current sensors composed of Fe67.5B22.5Nd6.3Nb3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free-standing cantilever structures that benefit from the superior mechanical properties of the metallic glass, such as high fracture toughness and high yield strength. The resonant frequency of the proposed FBNN cantilever was 3.85 kHz in the fundamental flexure mode when the length, width and thickness of the cantilever were 750 μm, 150 μm and 3 μm, respectively. A feed wire with a diameter of 500 μm was placed close to the FBNN cantilever, and a downshift in the resonance peak was observed when the current intensity through the feed wire increased. The sensitivity of this frequency shift to the current intensity was 5.0 √Hz/A when the distance between the cantilever and the wire was 500 μm.",

keywords = "Current sensor, Metallic glass, Micro-cantilever, Resonant sensor",

author = "Phan, {Tuan Anh} and Motoaki Hara and Hiroyuki Oguchi and Hiroki Kuwano",

note = "Funding Information: Part of this work was performed at the Micro/Nano-Machining Research and Education Center, Tohoku University, Japan. This work was supported in part by the New Energy and Industrial Technology Development Organization in Japan ( J100002626 ). Publisher Copyright: {\textcopyright} 2015 Elsevier B.V. All rights reserved.",

year = "2015",

month = mar,

day = "5",

doi = "10.1016/j.mee.2015.02.043",

language = "English",

volume = "135",

pages = "28--31",

journal = "Microelectronic Engineering",

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AU - Phan, Tuan Anh

AU - Hara, Motoaki

AU - Oguchi, Hiroyuki

AU - Kuwano, Hiroki

N1 - Funding Information: Part of this work was performed at the Micro/Nano-Machining Research and Education Center, Tohoku University, Japan. This work was supported in part by the New Energy and Industrial Technology Development Organization in Japan ( J100002626 ). Publisher Copyright: © 2015 Elsevier B.V. All rights reserved.

PY - 2015/3/5

Y1 - 2015/3/5

N2 - We report on the development of MEMS current sensors composed of Fe67.5B22.5Nd6.3Nb3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free-standing cantilever structures that benefit from the superior mechanical properties of the metallic glass, such as high fracture toughness and high yield strength. The resonant frequency of the proposed FBNN cantilever was 3.85 kHz in the fundamental flexure mode when the length, width and thickness of the cantilever were 750 μm, 150 μm and 3 μm, respectively. A feed wire with a diameter of 500 μm was placed close to the FBNN cantilever, and a downshift in the resonance peak was observed when the current intensity through the feed wire increased. The sensitivity of this frequency shift to the current intensity was 5.0 √Hz/A when the distance between the cantilever and the wire was 500 μm.

AB - We report on the development of MEMS current sensors composed of Fe67.5B22.5Nd6.3Nb3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free-standing cantilever structures that benefit from the superior mechanical properties of the metallic glass, such as high fracture toughness and high yield strength. The resonant frequency of the proposed FBNN cantilever was 3.85 kHz in the fundamental flexure mode when the length, width and thickness of the cantilever were 750 μm, 150 μm and 3 μm, respectively. A feed wire with a diameter of 500 μm was placed close to the FBNN cantilever, and a downshift in the resonance peak was observed when the current intensity through the feed wire increased. The sensitivity of this frequency shift to the current intensity was 5.0 √Hz/A when the distance between the cantilever and the wire was 500 μm.

KW - Current sensor

KW - Metallic glass

KW - Micro-cantilever

KW - Resonant sensor

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JO - Microelectronic Engineering

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ER -

Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers

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