Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers

Tuan Anh Phan, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Article査読

21 被引用数 (Scopus)


We report on the development of MEMS current sensors composed of Fe67.5B22.5Nd6.3Nb3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free-standing cantilever structures that benefit from the superior mechanical properties of the metallic glass, such as high fracture toughness and high yield strength. The resonant frequency of the proposed FBNN cantilever was 3.85 kHz in the fundamental flexure mode when the length, width and thickness of the cantilever were 750 μm, 150 μm and 3 μm, respectively. A feed wire with a diameter of 500 μm was placed close to the FBNN cantilever, and a downshift in the resonance peak was observed when the current intensity through the feed wire increased. The sensitivity of this frequency shift to the current intensity was 5.0 √Hz/A when the distance between the cantilever and the wire was 500 μm.

ジャーナルMicroelectronic Engineering
出版ステータスPublished - 2015 3月 5

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学


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