Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film

Takuro Tomita; Shigeki Matsuo; Tatsuya Okada; Tsunenobu Kimoto; Hiroyuki Matsunami; Takeshi Mitani; Shin Ichi Nakashima

doi:10.1063/1.2142080

Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film

Takuro Tomita, Shigeki Matsuo, Tatsuya Okada, Tsunenobu Kimoto, Hiroyuki Matsunami, Takeshi Mitani, Shin Ichi Nakashima

研究成果: Article › 査読

6 被引用数 (Scopus)

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The structures of comet defects in a 4H-SiC homoepitaxially grown film are investigated by deep-ultraviolet micro-Raman spectroscopy. Spatial distribution of the 4H- and 3C-SiC is clearly distinguished both from the intensities of the folded longitudinal acoustic phonon mode and the peak energies of the nonfolded longitudinal optical phonon mode. The mappings of these parameters indicate the existence of two types of comets. The mechanisms of heteropolytypic inclusion in comets are discussed.

本文言語	English
論文番号	241906
ページ（範囲）	1-3
ページ数	3
ジャーナル	Applied Physics Letters
巻	87
号	24
DOI	https://doi.org/10.1063/1.2142080
出版ステータス	Published - 2005
外部発表	はい

ASJC Scopus subject areas

物理学および天文学（その他）

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10.1063/1.2142080

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@article{5bb0dea6a8864b61a8a62f8ddc9395e1,

title = "Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film",

abstract = "The structures of comet defects in a 4H-SiC homoepitaxially grown film are investigated by deep-ultraviolet micro-Raman spectroscopy. Spatial distribution of the 4H- and 3C-SiC is clearly distinguished both from the intensities of the folded longitudinal acoustic phonon mode and the peak energies of the nonfolded longitudinal optical phonon mode. The mappings of these parameters indicate the existence of two types of comets. The mechanisms of heteropolytypic inclusion in comets are discussed.",

author = "Takuro Tomita and Shigeki Matsuo and Tatsuya Okada and Tsunenobu Kimoto and Hiroyuki Matsunami and Takeshi Mitani and Nakashima, {Shin Ichi}",

year = "2005",

doi = "10.1063/1.2142080",

language = "English",

volume = "87",

pages = "1--3",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "24",

}

TY - JOUR

T1 - Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film

AU - Tomita, Takuro

AU - Matsuo, Shigeki

AU - Okada, Tatsuya

AU - Kimoto, Tsunenobu

AU - Matsunami, Hiroyuki

AU - Mitani, Takeshi

AU - Nakashima, Shin Ichi

PY - 2005

Y1 - 2005

N2 - The structures of comet defects in a 4H-SiC homoepitaxially grown film are investigated by deep-ultraviolet micro-Raman spectroscopy. Spatial distribution of the 4H- and 3C-SiC is clearly distinguished both from the intensities of the folded longitudinal acoustic phonon mode and the peak energies of the nonfolded longitudinal optical phonon mode. The mappings of these parameters indicate the existence of two types of comets. The mechanisms of heteropolytypic inclusion in comets are discussed.

AB - The structures of comet defects in a 4H-SiC homoepitaxially grown film are investigated by deep-ultraviolet micro-Raman spectroscopy. Spatial distribution of the 4H- and 3C-SiC is clearly distinguished both from the intensities of the folded longitudinal acoustic phonon mode and the peak energies of the nonfolded longitudinal optical phonon mode. The mappings of these parameters indicate the existence of two types of comets. The mechanisms of heteropolytypic inclusion in comets are discussed.

UR - http://www.scopus.com/inward/record.url?scp=28944451206&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=28944451206&partnerID=8YFLogxK

U2 - 10.1063/1.2142080

DO - 10.1063/1.2142080

M3 - Article

AN - SCOPUS:28944451206

SN - 0003-6951

VL - 87

SP - 1

EP - 3

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 24

M1 - 241906

ER -

Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film

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