Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film
Takuro Tomita, Shigeki Matsuo, Tatsuya Okada, Tsunenobu Kimoto, Hiroyuki Matsunami, Takeshi Mitani, Shin Ichi Nakashima
研究成果: Article › 査読
6
被引用数
(Scopus)