抄録
A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 123-127 |
| ページ数 | 5 |
| ジャーナル | Journal of Electron Microscopy |
| 巻 | 57 |
| 号 | 4 |
| DOI | |
| 出版ステータス | Published - 2008 8月 1 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 器械工学