TY - JOUR
T1 - Development of embedded Mach-Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing
AU - Kada, W.
AU - Miura, K.
AU - Kato, H.
AU - Saruya, R.
AU - Kubota, A.
AU - Satoh, T.
AU - Koka, M.
AU - Ishii, Y.
AU - Kamiya, T.
AU - Nishikawa, H.
AU - Hanaizumi, O.
N1 - Funding Information:
This research was partially supported by a MEXT/JSPS Grant-in-Aid for Scientific Research (C) (no. 24510119 ) and by the Iketani Science and Technology Foundation . This study was carried out in the framework of “Element Innovation” Project by MEXT and the Human Resources Cultivation Center (HRCC), Gunma University, Japan.
Publisher Copyright:
© 2014 Elsevier B.V. All rights reserved.
PY - 2015
Y1 - 2015
N2 - A focused 750 keV proton microbeam was used to fabricate an embedded Mach-Zehnder (MZ) optical waveguide in a polydimethylsiloxane (PDMS) film for interferometer application. The sample position was precisely controlled by a mechanical stage together with scanning microbeam to form an embedded MZ waveguide structure within an area of 0.3 mm × 40 mm. The MZ waveguides with core size of 8 μm was successfully embedded in PDMS film at a depth of 18 μm by 750 keV proton microbeam with fluences from 10 to 100 nC/mm2. The MZ waveguides were coupled with an IR fiber-laser with a center wavelength of 1550 nm and evaluated by using the transmitted intensity images from an IR vidicon camera. The results indicate that the embedded MZ waveguide structure in PDMS achieved single spot light propagation, which is necessary for building optical switching circuits based on polymer MZ waveguides.
AB - A focused 750 keV proton microbeam was used to fabricate an embedded Mach-Zehnder (MZ) optical waveguide in a polydimethylsiloxane (PDMS) film for interferometer application. The sample position was precisely controlled by a mechanical stage together with scanning microbeam to form an embedded MZ waveguide structure within an area of 0.3 mm × 40 mm. The MZ waveguides with core size of 8 μm was successfully embedded in PDMS film at a depth of 18 μm by 750 keV proton microbeam with fluences from 10 to 100 nC/mm2. The MZ waveguides were coupled with an IR fiber-laser with a center wavelength of 1550 nm and evaluated by using the transmitted intensity images from an IR vidicon camera. The results indicate that the embedded MZ waveguide structure in PDMS achieved single spot light propagation, which is necessary for building optical switching circuits based on polymer MZ waveguides.
KW - Embedded structures
KW - Interferometer
KW - Mach-Zehnder optical waveguide
KW - Polydimethylsiloxane
KW - Proton beam writing
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U2 - 10.1016/j.nimb.2014.12.041
DO - 10.1016/j.nimb.2014.12.041
M3 - Article
AN - SCOPUS:85027943330
SN - 0168-583X
VL - 348
SP - 218
EP - 222
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ER -