Development of embedded Mach-Zehnder optical waveguide structures in polydimethylsiloxane thin films by proton beam writing

W. Kada, K. Miura, H. Kato, R. Saruya, A. Kubota, T. Satoh, M. Koka, Y. Ishii, T. Kamiya, H. Nishikawa, O. Hanaizumi