Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing

Hitoshi Nishino; Shinya Yoshida; Akira Kojima; Naokatsu Ikegami; Nobuyoshi Koshida; Shuji Tanaka; Masayoshi Esashi

doi:10.1109/MEMSYS.2014.6765678

Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing

Hitoshi Nishino, Shinya Yoshida, Akira Kojima, Naokatsu Ikegami, Nobuyoshi Koshida, Shuji Tanaka, Masayoshi Esashi

研究成果: Conference contribution

8 被引用数 (Scopus)

抄録

This paper mainly reports the process development of a Pierce-type nanocrystalline Si (nc-Si) electron emitter array for massively parallel electron beam (EB) lithography based on active-matrix operation using a large-scaled integrated circuit (LSI). The emitter array consists of 100×100 hemispherical emitters formed by isotropic wet etching of Si. EB resist patterning was demonstrated by 1:1 projection exposure using a discrete emitter array at CMOS-compatible operation voltages. To independently control each emitter using the LSI, isolation trenches filled with benzocyclobutene (BCB) were fabricated in the Si substrate. In addition, the integration process of the emitter array, the LSI and an extraction electrode plate was developed based on Au-In and polymer bonding technologies.

本文言語	English
ホスト出版物のタイトル	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	467-470
ページ数	4
ISBN（印刷版）	9781479935086
DOI	https://doi.org/10.1109/MEMSYS.2014.6765678
出版ステータス	Published - 2014
外部発表	はい
イベント	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States 継続期間: 2014 1月 26 → 2014 1月 30

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
国/地域	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMSYS.2014.6765678

他のファイルとリンク

フィンガープリント

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引用スタイル

Nishino, H., Yoshida, S., Kojima, A., Ikegami, N., Koshida, N., Tanaka, S., & Esashi, M. (2014). Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 467-470). 記事 6765678 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765678

Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing. / Nishino, Hitoshi; Yoshida, Shinya; Kojima, Akira その他.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 467-470 6765678 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

研究成果: Conference contribution

Nishino, H, Yoshida, S, Kojima, A, Ikegami, N, Koshida, N, Tanaka, S & Esashi, M 2014, Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765678, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 467-470, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765678

Nishino H, Yoshida S, Kojima A, Ikegami N, Koshida N, Tanaka S その他. Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 467-470. 6765678. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765678

Nishino, Hitoshi ; Yoshida, Shinya ; Kojima, Akira その他. / Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 467-470 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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