Development of micromachining technology in ion microbeam system at TIARA, JAEA
T. Kamiya, H. Nishikawa, T. Satoh, J. Haga, M. Oikawa, Y. Ishii, T. Ohkubo, N. Uchiya, Y. Furuta
研究成果: Article › 査読
4
被引用数
(Scopus)