Dielectric spectroscopy of a thin surface layer by differential time-domain reflectometry using a coplanar waveguide circuit line probe

R. Shirakashi, T. Ogawa, J. Yamada

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Dielectric spectroscopy is a powerful method for measuring the relaxation properties of various materials, especially soft materials. Among these soft materials, living systems and artificial multilayer films have layered structures with a thickness on the order of nano- to micrometers. To measure the dielectric spectra of such a thin layer, the measurement probe for dielectric spectroscopy requires the structure to possess a low measurement depth that is comparable to the thickness of the thin layer. For this purpose, we developed a probe for measuring the dielectric spectra of material surfaces of various depths using differential time-domain reflectometry. The developed probes consist of coplanar waveguide circuits of 280 μm to 1 mm line width, which allows for the measurement of the dielectric spectra of the material surface layer with thicknesses in the range of 450 μm to 1.2 mm. The proposed structure of the measurement probe enables the dielectric spectroscopy of a thinner material surface layer by reducing the width and pitch of the coplanar waveguide circuit lines.

本文言語English
論文番号025501
ジャーナルMeasurement Science and Technology
24
2
DOI
出版ステータスPublished - 2013 2月

ASJC Scopus subject areas

  • 器械工学
  • 工学(その他)
  • 応用数学

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