TY - GEN
T1 - Displacement magnification of gel actuator using pNIPAAm-SU8 hybrid structure
AU - Kogure, Takanobu
AU - Okada, Ryoya
AU - Maeda, Shingo
AU - Nagasawa, Sumito
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/2/26
Y1 - 2015/2/26
N2 - In this paper, a fabrication method for a hybrid structure of the poly-N-Isopropylacrylamide (pNIPAAm) gel as a soft material and the SU-8 as a solid material is proposed. This pNIPAAm-SU8 hybrid structure can be applied to various applications such as gel actuators. These hybrid structures have a serious problem that it is easily broken by the difference of swelling rate. Our proposed hybrid structure was not broken though repeating swelling-shrinking states for 10 or more times. A small displacement of the gel is occurred by the phase transition, then it is magnified by combining with the SU-8 solid structure. We demonstrated that the expanded tip displacement of the SU-8 solid structure reached 145μm.
AB - In this paper, a fabrication method for a hybrid structure of the poly-N-Isopropylacrylamide (pNIPAAm) gel as a soft material and the SU-8 as a solid material is proposed. This pNIPAAm-SU8 hybrid structure can be applied to various applications such as gel actuators. These hybrid structures have a serious problem that it is easily broken by the difference of swelling rate. Our proposed hybrid structure was not broken though repeating swelling-shrinking states for 10 or more times. A small displacement of the gel is occurred by the phase transition, then it is magnified by combining with the SU-8 solid structure. We demonstrated that the expanded tip displacement of the SU-8 solid structure reached 145μm.
UR - http://www.scopus.com/inward/record.url?scp=84931086528&partnerID=8YFLogxK
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U2 - 10.1109/MEMSYS.2015.7051151
DO - 10.1109/MEMSYS.2015.7051151
M3 - Conference contribution
AN - SCOPUS:84931086528
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1082
EP - 1085
BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Y2 - 18 January 2015 through 22 January 2015
ER -