TY - JOUR
T1 - Effect of threshold size and counting efficiency on the leak evaluation of particle counters
AU - NOR, Muhammad Aiman MOHD
AU - SUWA, Yoshihide
N1 - Publisher Copyright:
© 2021 Japan Association of Aerosol Science and Technology. All right reserved.
PY - 2021
Y1 - 2021
N2 - In the previous work, two types of installed filter leak tests described in ISO 14644-3; aerosol photometer method and light-scattering airborne particle counter (LSAPC) method, were examined by considering the difference in the characteristics of each measuring instrument. It was found that the same leak detection criterion (LDC) could be applied to filters above H14 grade in both test methods. Hence, the LDC of the aerosol photometer method could be applied in the LSAPC method for H14 or higher grade filters. However, LSAPCs have different optical, flow and electrical systems, resulting in different counting efficiency functions (CEFs). Furthermore, ISO 21501-4 allows LSAPCs to have a certain range of CEF. Therefore, it was necessary to ensure whether the same LDC could be applied in the installed filter leak test when applying different measuring instruments admitted by 21501-4. In this study, using theoretical calculation, the determination of threshold size, which makes the LDC unification possible between the two test methods, was further discussed, and penetrations detected by LSAPC with various CEFs were evaluated. It was concluded that 0.3 μm is the most suitable threshold size, and the same LDC studied in the previous work could be applied to the LSAPC with different CEFs.
AB - In the previous work, two types of installed filter leak tests described in ISO 14644-3; aerosol photometer method and light-scattering airborne particle counter (LSAPC) method, were examined by considering the difference in the characteristics of each measuring instrument. It was found that the same leak detection criterion (LDC) could be applied to filters above H14 grade in both test methods. Hence, the LDC of the aerosol photometer method could be applied in the LSAPC method for H14 or higher grade filters. However, LSAPCs have different optical, flow and electrical systems, resulting in different counting efficiency functions (CEFs). Furthermore, ISO 21501-4 allows LSAPCs to have a certain range of CEF. Therefore, it was necessary to ensure whether the same LDC could be applied in the installed filter leak test when applying different measuring instruments admitted by 21501-4. In this study, using theoretical calculation, the determination of threshold size, which makes the LDC unification possible between the two test methods, was further discussed, and penetrations detected by LSAPC with various CEFs were evaluated. It was concluded that 0.3 μm is the most suitable threshold size, and the same LDC studied in the previous work could be applied to the LSAPC with different CEFs.
KW - Aerosol Photometer
KW - Cleanroom
KW - Counting Efficiency Function
KW - ISO Standard
KW - Installed Filter Leakage Test
KW - Particle Counter
KW - Threshold Size
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U2 - 10.11203/jar.36.129
DO - 10.11203/jar.36.129
M3 - Article
AN - SCOPUS:85108681330
SN - 0912-2834
VL - 36
SP - 129
EP - 135
JO - Earozoru Kenkyu
JF - Earozoru Kenkyu
IS - 2
ER -