Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates

Miyoko Tanaka; Kazutaka Mitsuishi; Masaki Takeguchi; Masayuki Shimojo; Kazuo Furuya; Nobuyuki Koguchi

doi:10.1143/JJAP.46.6243

Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO₃ substrates

Miyoko Tanaka, Kazutaka Mitsuishi, Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya, Nobuyuki Koguchi

研究成果: Article › 査読

2 被引用数 (Scopus)

抄録

We performed electron-beam-induced deposition (EBID) of Fe(CO)₅ on cleaned Nb-doped SrTiO₃(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.

本文言語	English
ページ（範囲）	6243-6246
ページ数	4
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	46
号	9 B
DOI	https://doi.org/10.1143/JJAP.46.6243
出版ステータス	Published - 2007 9月 20
外部発表	はい

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

文献へのアクセス

10.1143/JJAP.46.6243

他のファイルとリンク

引用スタイル

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title = "Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates",

abstract = "We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.",

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AU - Koguchi, Nobuyuki

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AB - We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.

KW - Electron-beam-induced deposition

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KW - Nanoparticles

KW - SrTiO

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KW - Transmission electron microscopy

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