Electron beam induced deposition of position and size controlled structures on the nanometre scale

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka, M. Takeguchi

研究成果: Article › 査読

本文言語	English
ページ（範囲）	239-242
ジャーナル	Springer Proceedings in Physics
巻	vol. 107
出版ステータス	Published - 2006 1月 1

引用スタイル

@article{402f3b6e09e44bbfbe54f88c9d531dee,

title = "Electron beam induced deposition of position and size controlled structures on the nanometre scale",

author = "K. Furuya and K. Mitsuishi and M. Shimojo and M. Song and M. Tanaka and M. Takeguchi",

year = "2006",

month = jan,

day = "1",

language = "English",

volume = "vol. 107",

pages = "239--242",

journal = "Springer Proceedings in Physics",

}