Electron beam induced depositions of nano-dots by the presence of the partial pressure of precursor

K. Furuya, M. Tanaka, M. Shimojo, K. Mitsuishi

研究成果: Article › 査読

本文言語	English
ページ（範囲）	540-541
ページ数	2
ジャーナル	Microscopy and Microanalysis
巻	10
号	SUPPL. 2
DOI	https://doi.org/10.1017/S1431927604883892
出版ステータス	Published - 2004
外部発表	はい

ASJC Scopus subject areas

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