抄録
Focused electron beam induced chemical vapor deposition was performed in a scanning electron microscope with a field emission gun using a precursor of iron carbonyl. Due to the longer deposition time and higher gas pressure than those of our previous electron beam-induced deposition method, a new type of deposition occurred. A large amount of nanosized crystals were produced around the focused beam irradiation point on a carbon substrate at room temperature. The nanocrystals were systematically characterized using transmission electron microscopy with electron energy loss spectroscopy (EELS), and were identified to be single crystals of α-Fe.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 2577-2580 |
| ページ数 | 4 |
| ジャーナル | Journal of Materials Science |
| 巻 | 41 |
| 号 | 9 |
| DOI | |
| 出版ステータス | Published - 2006 5月 1 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 材料科学（全般）
- 材料力学
- 機械工学