@inproceedings{d27ee8091ce74f43ab31c57fc941892a,
title = "Electron beam-induced nano-deposition using a transmission electron microscope",
abstract = "Nanometre-sized structures were fabricated by electron beam-induced deposition in a scanning transmission electron microscope. A small amount of metal-organic gases, W(CO)6 and dimethyl acetylacetonato gold, were introduced near a substrate in the chamber of the microscope. The gas was decomposed by the irradiation of focused electron beams and nanometre-sized deposits containing W or Au were produced. Moving the beam position enables us to produce structures with a variety of shapes. High-resolution electron microscopy observation revealed that the structures consisted of nano-crystalline and amorphous parts.",
keywords = "Deposition, Electron beam, Metal-organic gas, Nano-fabrication, Structure",
author = "M. Shimojo and K. Mitsuishi and M. Tanaka and M. Song and K. Furuya",
year = "2005",
month = dec,
day = "1",
language = "English",
isbn = "0878499628",
series = "Materials Science Forum",
pages = "129--132",
booktitle = "Cross-Disciplinary Applied Research in Materials Science and Technology - Proceedings of the 1st International Meeting on Applied Physics, (APHYS-2003)",
note = "1st International Meeting on Applied Physics, APHYS-2003 ; Conference date: 13-10-2003 Through 18-10-2003",
}