Electron induced nanodeposition of tungsten using field emission scanning and transmission electron microscopes

M. Shimojo, K. Mitsuishi, A. Tameike, K. Furuya

研究成果: Article › 査読

本文言語	English
ページ（範囲）	742-746
ページ数	5
ジャーナル	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
巻	22
号	2
DOI	https://doi.org/10.1116/1.1688349
出版ステータス	Published - 2004
外部発表	はい

ASJC Scopus subject areas

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