Enhancing proton beam writing system with auto scanning software and stage movement

Proton beam writing (PBW) is known to be a powerful tool with unique advantages for microfabrication. In order to solve remaining problems and bring the PBW technology to a new level of applications, we propose a microfabrication system based on a PBW that makes fabrication of microstructures in an area only a centimeter large possible. We combined XY-stage control and electrostatic scanning to eliminate the area restrictions of our previous PBW system, and included a feature for importing CAD (Computer Aided Design) data which enables faster and more accurate development of complicated structures.