Evaluations of mechanical properties of DLC film by indentation method and the effect of substrate

Tomoyuki Nakayama, Kenichi Sakaue, Takeshi Ogawa, Yoshifumi Kobayashi, Takema Teratani

研究成果: Article査読

1 被引用数 (Scopus)


This paper discussed the fracture mechanism of diamond like carbon (DLC) film subjected to contact loading. The DLC films with the thickness of about 12μm were deposited onto SUS304, SUS410 and WC-Co substrates by radio frequency (RF) plasma-based ion implantation method. Dual indenter method was applied to determine the stress-strain response of the films. Rockwell indentation tests with simultaneous monitoring of acoustic emission (AE) and corrosion potential fluctuation (CPF) techniques were also applied to the films to evaluate the static tensile strength. FEM analyses demonstrated the stress distribution under indentation testing and correlated the film fracture behavior with static strength of the films, which was assumed to be independent of the substrate materials based on the results of Raman spectra and indentation tests. Cyclic indentation tests were performed on the DLC film deposited onto WC-Co in order to evaluate the fatigue strength of the film. The cyclic fatigue was found to degrade the film strength compared to the static property.

ジャーナルZairyo/Journal of the Society of Materials Science, Japan
出版ステータスPublished - 2009 10月

ASJC Scopus subject areas

  • 材料科学一般
  • 凝縮系物理学
  • 材料力学
  • 機械工学


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