Fabrication and characterization of nano-dots produced by electron beam induced deposition using metal carbonyls
M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya
研究成果: Conference contribution
M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya
研究成果: Conference contribution