Fabrication and evaluation of 3D-electric micro filters using proton beam writing

Yusuke Furuta, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

研究成果: Article査読

15 被引用数 (Scopus)


Dielectrophoresis (DEP) is a phenomenon involving translational movement of a polarizable object toward the direction of the electric field gradient. DEP has been used for electrical trapping of food poisoning microbes such as Escherichia coli (E. coli). In this paper, we developed 3D-electric micro filters equipped with high-aspect-ratio pillar array with a height of ∼15 μm and a diameter of ∼1 μm as a part of the electric micro filter. The pillar array was fabricated using a 15 micrometer thick negative resist layer on silica substrate by proton beam writing (PBW). We analyzed a DEP force distribution around pillars in the 3D-electric micro filters. Making the most of superior features of PBW as a rapid prototyping tool, we evaluate the performance of the DEP device for trapping capability of E. coli by photoluminescence (PL) measurement for various arrangements of the pillars to achieve higher trapping efficiency of the 3D-electric micro filter.

ジャーナルMicroelectronic Engineering
出版ステータスPublished - 2009 4月 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学


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