Fabrication of Bi4Ti3O12 thin films using alcohol related solutions by micro liquid delivery systems

Masaki Yamaguchi; Asa Yamamoto; Yoichiro Masuda

doi:10.1109/ISAF.2007.4393190

Fabrication of Bi₄Ti₃O₁₂ thin films using alcohol related solutions by micro liquid delivery systems

Masaki Yamaguchi, Asa Yamamoto, Yoichiro Masuda

研究成果: Conference contribution

抄録

We fabricate the bismut titanate (Bi₄Ti₃O ₁₂) thin films used an alcohol related solutions which dissolved Bi(OtC₅H₁₁)₃ and Ti[OCH(CH₃) ₂]₄ in C₂H₅OC₂H ₄OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm² and 36kV/cm, respectively, and shows fatigue properties up to 10⁸ times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.

本文言語	English
ホスト出版物のタイトル	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
ページ	126-129
ページ数	4
DOI	https://doi.org/10.1109/ISAF.2007.4393190
出版ステータス	Published - 2007
イベント	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan 継続期間: 2007 5月 27 → 2007 5月 31

出版物シリーズ

名前	IEEE International Symposium on Applications of Ferroelectrics

Conference

Conference	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
国/地域	Japan
City	Nara-city
Period	07/5/27 → 07/5/31

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
電子工学および電気工学

文献へのアクセス

10.1109/ISAF.2007.4393190

他のファイルとリンク

引用スタイル

Yamaguchi, M., Yamamoto, A., & Masuda, Y. (2007). Fabrication of Bi₄Ti₃O₁₂ thin films using alcohol related solutions by micro liquid delivery systems. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 126-129). [4393190] (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393190

Yamaguchi, M, Yamamoto, A & Masuda, Y 2007, Fabrication of Bi₄Ti₃O₁₂ thin films using alcohol related solutions by micro liquid delivery systems. in 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF., 4393190, IEEE International Symposium on Applications of Ferroelectrics, pp. 126-129, 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF, Nara-city, Japan, 07/5/27. https://doi.org/10.1109/ISAF.2007.4393190

@inproceedings{76583ee7663a4dcdbec8c2e78fadcf86,

title = "Fabrication of Bi4Ti3O12 thin films using alcohol related solutions by micro liquid delivery systems",

abstract = "We fabricate the bismut titanate (Bi4Ti3O 12) thin films used an alcohol related solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 2]4 in C2H5OC2H 4OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm2 and 36kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.",

author = "Masaki Yamaguchi and Asa Yamamoto and Yoichiro Masuda",

year = "2007",

doi = "10.1109/ISAF.2007.4393190",

language = "English",

isbn = "1424413338",

series = "IEEE International Symposium on Applications of Ferroelectrics",

pages = "126--129",

booktitle = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF",

note = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF ; Conference date: 27-05-2007 Through 31-05-2007",

}

TY - GEN

T1 - Fabrication of Bi4Ti3O12 thin films using alcohol related solutions by micro liquid delivery systems

AU - Yamaguchi, Masaki

AU - Yamamoto, Asa

AU - Masuda, Yoichiro

PY - 2007

Y1 - 2007

N2 - We fabricate the bismut titanate (Bi4Ti3O 12) thin films used an alcohol related solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 2]4 in C2H5OC2H 4OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm2 and 36kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.

AB - We fabricate the bismut titanate (Bi4Ti3O 12) thin films used an alcohol related solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3) 2]4 in C2H5OC2H 4OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6μC/cm2 and 36kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.

UR - http://www.scopus.com/inward/record.url?scp=51349106645&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=51349106645&partnerID=8YFLogxK

U2 - 10.1109/ISAF.2007.4393190

DO - 10.1109/ISAF.2007.4393190

M3 - Conference contribution

AN - SCOPUS:51349106645

SN - 1424413338

SN - 9781424413331

T3 - IEEE International Symposium on Applications of Ferroelectrics

SP - 126

EP - 129

BT - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

T2 - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

Y2 - 27 May 2007 through 31 May 2007

ER -