Fabrication of fine-pitch TiO₂-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses

TiO₂-organic hybrid dot arrays were produced from TiO ₂-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol-gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO₂-organic hybrid material were calcined at 450°C. TiO₂-organic hybrid dot arrays with a refractive index of 2 were obtained.