Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

Yuta Maeyoshi; Katsuyoshi Takano; Atsushi Asano; Hiromi Marui; Masaaki Omichi; Takahiro Satoh; Tomihiro Kamiya; Yasuyuki Ishii; Takeru Ohkubo; Masashi Koka; Wataru Kada; Masaki Sugimoto; Hiroyuki Nishikawa; Akinori Saeki; Shu Seki

doi:10.1143/JJAP.51.045201

Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

Yuta Maeyoshi, Katsuyoshi Takano, Atsushi Asano, Hiromi Marui, Masaaki Omichi, Takahiro Satoh, Tomihiro Kamiya, Yasuyuki Ishii, Takeru Ohkubo, Masashi Koka, Wataru Kada, Masaki Sugimoto, Hiroyuki Nishikawa, Akinori Saeki, Shu Seki

研究成果: Article › 査読

1 被引用数 (Scopus)

抄録

A new and direct nano-microprocessing technique for poly(9,9'- dioctylfluorene) (PFO) films using proton beam writing (PBW) based on the crosslinking reaction of the polymer without a cross-linking agent was proposed. Not only the surface morphology but also structure size and shape on PFO films can be controlled from the nanometer to micrometer scale by adjusting the fluence of incident protons. Fabrication of three-dimensional PFO structures with an aspect ratio of 12 was successfully demonstrated by PBW with the adjustment of fluence at 3.5 x 10 ⁶ ions/μm ².

本文言語	English
論文番号	045201
ジャーナル	Japanese Journal of Applied Physics
巻	51
号	4 PART 1
DOI	https://doi.org/10.1143/JJAP.51.045201
出版ステータス	Published - 2012 4月

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

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10.1143/JJAP.51.045201

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Maeyoshi, Y., Takano, K., Asano, A., Marui, H., Omichi, M., Satoh, T., Kamiya, T., Ishii, Y., Ohkubo, T., Koka, M., Kada, W., Sugimoto, M., Nishikawa, H., Saeki, A., & Seki, S. (2012). Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing. Japanese Journal of Applied Physics, 51(4 PART 1), [045201]. https://doi.org/10.1143/JJAP.51.045201

Maeyoshi, Y, Takano, K, Asano, A, Marui, H, Omichi, M, Satoh, T, Kamiya, T, Ishii, Y, Ohkubo, T, Koka, M, Kada, W, Sugimoto, M, Nishikawa, H, Saeki, A & Seki, S 2012, 'Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing', Japanese Journal of Applied Physics, vol. 51, no. 4 PART 1, 045201. https://doi.org/10.1143/JJAP.51.045201

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title = "Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing",

abstract = "A new and direct nano-microprocessing technique for poly(9,9'- dioctylfluorene) (PFO) films using proton beam writing (PBW) based on the crosslinking reaction of the polymer without a cross-linking agent was proposed. Not only the surface morphology but also structure size and shape on PFO films can be controlled from the nanometer to micrometer scale by adjusting the fluence of incident protons. Fabrication of three-dimensional PFO structures with an aspect ratio of 12 was successfully demonstrated by PBW with the adjustment of fluence at 3.5 x 10 6 ions/μm 2.",

author = "Yuta Maeyoshi and Katsuyoshi Takano and Atsushi Asano and Hiromi Marui and Masaaki Omichi and Takahiro Satoh and Tomihiro Kamiya and Yasuyuki Ishii and Takeru Ohkubo and Masashi Koka and Wataru Kada and Masaki Sugimoto and Hiroyuki Nishikawa and Akinori Saeki and Shu Seki",

year = "2012",

month = apr,

doi = "10.1143/JJAP.51.045201",

language = "English",

volume = "51",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

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AU - Maeyoshi, Yuta

AU - Takano, Katsuyoshi

AU - Asano, Atsushi

AU - Marui, Hiromi

AU - Omichi, Masaaki

AU - Satoh, Takahiro

AU - Kamiya, Tomihiro

AU - Ishii, Yasuyuki

AU - Ohkubo, Takeru

AU - Koka, Masashi

AU - Kada, Wataru

AU - Sugimoto, Masaki

AU - Nishikawa, Hiroyuki

AU - Saeki, Akinori

AU - Seki, Shu

PY - 2012/4

Y1 - 2012/4

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Fabrication of poly(9,9'-dioctylfluorene)-based nano- and microstructures by proton beam writing

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