Fabrication of three-dimensional photonic crystals by femtosecond laser interference

Shigeki Matsuo, Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa

研究成果: Conference article査読

22 被引用数 (Scopus)


We describe a novel microfabrication method based on interference of several coherent laser pulses in photosensitive media. The method allows to transform the periodic multidimensional interference patterns into periodic modulation of dielectric properties of the material, and is therefore potentially suitable for the photonic crystal fabrication in materials like photoresists, photosensitive glasses, and others. We have fabricated one, two, and three-dimensional photonic crystals with different lattices and sub-micrometer periods. The fabricated structures have high structural quality, as evidenced by confocal and scanning electron microscopies. Furthermore, using numerical simulations we explore the possibilities to obtain body-centered-cubic and diamond photonic crystal lattices by varying optical phases of the interfering beams. Numerical simulations are also used to reveal photonic bandgap properties of some 2D phhotonic crystals, fabricated using this technique.

ジャーナルProceedings of SPIE - The International Society for Optical Engineering
出版ステータスPublished - 2002 4月 25
イベントPhotonic Bandgap Materials and Devices 2002 - San Jose, United States
継続期間: 2002 1月 192002 1月 25

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学


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